developed according to the current advanced microwave structure concept. It has

chemical vapor deposition (CVD) of multiple materials such as monocrystalline

microwave power generator. The microwave power is continuously adjustable

1%; the ripple is better than 1%, can

performance and adopts a perfect line safety blocking control system, which

2) The system uses an excellent microwave transmission system consisting of

isolation of the reflected wave from the solid-state power source to make it work

sampling, the reflected power and real - time working status are displayed in

plasma can be generated within the power output range. The plasma is stabilized

3. Vacuum acquisition and measurement and control system

and vacuum valve; the system has full-range measurement regulation from

torr, vacuum measurement and control system . The system is

The main air pressure of the cavity and the bypass air pressure of the sample

control is stable and easy to adjust.

system supply and control system (MFC) consist of H4and Na reliable 1/4' VCR interface and is built into the equipment cabinet. The gas path

Operating frequency:

1 ~ 12 kW continuously adjustable

Ripple:

Standard BJ-22 waveguide and FD-22

380VACthree-phase four-wire + ground

25L/min

≤2 mW/cm