medium process pressure microwave plasma based on uses’ specific

appearance, with all the characteristics it is especially suitable for the

film, surface treatment and modification of materials, as well as the growth

high-performance microwave circulator, three-stub tuner, water load with

to make it work stably. Can easily adjust the best match when the plasma load

displayed in digital form

mode, a door-type coaxial waveguide coupler with adjustable coaxial coupling

the plasma discharge chamber efficiently in a wide range of operation, and

ensure stable operation.

substrate. It is also equipped with a reticulated microwave shielding window, so

window are respectively provided in the left and right directions and the rear.

system composed of auxiliary inflatable pipes.

plasma processing

2450MHz

Power stability:

better than 1%

Output waveguide interface: BJ-26, 22 with FD-26, 22 standard flange

ground, 11kW

System standing wave coefficient: VSWR ≤ 1.5

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