Summary
Airtight structure is realized by Argon welded chamber and sealing by heatproof material of whole outside. Heat treatment can be carried out in clean atmosphere with the heatproof HEPA filter. Two types of maximum operation temperature model are available.
Specification
Type
Regular model : CLO-XXX
High temperature model : CLO-XXXH
Model
| Model | Regular model | High temperature model |
| Stack | CLO-XXX | CLO-XXXH |
| Operation Temperature | RT+60 - 200 deg-C | RT+60 - 350 deg-C |
| Temperature distribution | +/- 4 at 200 deg-C | +/- 8 at 350 deg-C |
| Heat up time(min) | <60, RT-200deg-C | <120, RT-350deg-C |
| Cleanliness | Class 100 | Class 100 |
Variation
| Model | CLO-2A / CLO-2AH | CLO-9C / CLO-9CH | CLO-21C / CLO-21CH |
| Stack | Desktop | Benchtop | Floor |
| Exterior dimensionW x H x D(mm) | 590 x 460 x 600 | 1040 x 690 x 900 | 860 x 1470 x 1010 |
| Inside dimensionW x H x D(mm) | 250 x 250 x 250 | 450 x 450 x 450 | 660 x 660 x 500 |
| Power source(V�hases) | 100�1 | 200�3 | 200�3 |
| Weight(kg) | 1400 | 3300 | 5400 |
| Flat zone length(mm) | 50 | 180 | 250 |
| Cooling water(L/min) | None/None | None/ 2 | None/ 2 |
| Model | CLO-30C / CLO-30CH | CLO-51C / CLO-51CH |
| Stack | Floor | Floor |
| Exterior dimensionW x H x D(mm) | 860 x 1560 x 1170 | 860 x 2105 x 1210 |
| Inside dimensionW x H x D(mm) | 660 x 660 x 600 | 660 x 1320 x 650 |
| Power source(V�hases) | 200�3 | 200�3 |
| Weight(kg) | 5600 | 10800 |
| Flat zone length(mm) | 300 | 550 |
| Cooling water(L/min) | None/ 2 | None/ 2 |
