Models |
S-Closed loop K-Open loop |
P33.T2S P33.T2K |
P33.T3S P33.T3K |
P33.T4S P33.T4K |
P33.T5S P33.T5K |
P33.T6S P33.T6K |
P33.T8S P33.T8K |
Units |
Active axes |
θx, θy |
θx, θy |
θx, θy |
θx, θy |
θx, θy |
θx, θy | ||
Travel range(0~120V) |
2.5(≈520") /±1.25(≈±260") |
4(≈820") /±2(≈±410") |
5(≈1030") /±2.5(≈±520") |
6.8(≈1400") /±3.4(≈±700") |
7.5(≈1550") /±3.75(≈±770") |
10(≈2060") /±5(≈±1030") |
mrad±20% | |
Travel range(0~150V) |
3(≈600") /±1.5(≈±300") |
5(≈1000") /±2.5(≈±500") |
6(≈1200") /±3(≈±600") |
8.5(≈1700") /±4.25(≈±850") |
9(≈1900") /±4.5(≈±950") |
12.5(≈2500") /±6.25(≈±1250") |
mrad±20% | |
Integrated sensor |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- | ||
Closed/open loop resolution |
0.05(≈0.01") 0.02(<0.01") |
0.15(≈0.03") 0.05(≈0.01") |
0.25(≈0.05") 0.1(≈0.02") |
0.35(≈0.07") 0.12(≈0.02") |
0.45(≈0.09") 0.15(≈0.03") |
0.5(≈0.1") 0.2(≈0.04") |
μrad | |
Closed-loop linearity |
0.1/- |
0.15/- |
0.2/- |
0.25/- |
0.25/- |
0.25/- |
%F.S. | |
Repeatability |
0.02/- |
0.02/- |
0.02/- |
0.02/- |
0.02/- |
0.02/- |
%F.S. | |
Unloaded resonant frequency |
3.7 |
3.5 |
3.4 |
3.3 |
3.2 |
3.1 |
kHz±20% | |
Closed/open-loop unloaded Step time |
1.5/1 |
2.5/1.5 |
3/2 |
5/2.5 |
6/3.5 |
8/4 |
ms±20% | |
Operating frequency |
10% Trave |
1000 |
800 |
500 |
400 |
300 |
150 |
Hz±20% |
100% Travel |
80 |
60 |
40 |
30 |
25 |
15 | ||
Electrical capacitance |
3.6/axis |
5.2/axis |
7.2/axis |
9/axis |
11/axis |
14.5/axis |
μF±20% | |
Material |
Steel |
Steel |
Steel |
Steel |
Steel |
Steel | ||
Material |
190 |
220 |
240 |
265 |
290 |
340 |