Ion Implantation

Semiconductor Process Service

Ion Technology Center provides semiconductor process services such as ion implantation, annealing , film deposition and so on. As we have sufficient experience on compound semiconductors; SiC, GaN, etc., we can help you to develop such semiconductor power devices.

• Ion Implantation

• Activation Annealing

• Film Deposition

• Heat Treatment

• Photo-Lithography

• Etching

Ion Implantation Service

More than 60 species of ions such as Al and N atoms can be implanted as well as B, P and AS.

60 or more kinds of ion species