High-Precision Nanopositioning System with 6 Degrees of Freedom
6 motion axes: 3linear, 3rotational
Travel ranges to 200 m linear and to 1 mrad tilt angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Highest linearity and stability with capacitive sensors
Frictionless, high-precision flexure guiding system
Excellent Scan-Flatness
Clear aperture 66 mm66 mm
Outstanding lifetime due to PICMA piezo actuators
UHV-compatible to 10-9 hPa
