| Models | End with S: Closed-loop End with K: Open-loop |
P11.X100S P11.X100K |
P11.Z100S P11.Z100K |
P11.XY100S P11.XY100K |
P11.XZ100S P11.XZ100K |
P11.XYZ100S P11.XYZ100K |
Units |
| Active axes | X | Z | X, Y | X, Z | X, Y, Z | ||
| Nominal travel range(0~120V) | 80 | 80 | 80/axis | 80/axis | 80/axis | μm±20% | |
| Max travel range(0~150V) | 100 | 100 | 100/axis | 100/axis | 100/axis | μm±20% | |
| Integrated sensor | SGS/- | SGS/- | SGS/- | SGS/- | SGS/- | ||
| Closed/open loop resolution | 7/4 | 7/4 | 7/4 | 7/4 | 7/4 | nm | |
| Closed-loop linearity | 0.05/- | 0.05/- | 0.1/- | 0.1/- | 0.1/- | %F.S. | |
| Repeatability | 0.03/- | 0.03/- | 0.03/- | 0.03/- | 0.05/- | %F.S. | |
| Stiffness in motion direction | 0.3 | 0.3 | X0.25/Y0.3 | X0.25/Z0.3 | X0.25/Y0.3/Z0.2 | N/μm±20% | |
| Unloaded resonant frequency | 0.3 | 0.3 | X0.2/Y0.3 | X0.2/Z0.3 | X0.25/Y0.3/Z0.18 | kHz±20% | |
| Load capacity | 0.8 | 0.8 | 0.7 | 0.7 | 0.6 | kg | |
| Electrical capacitance | 1.8 | 1.8 | 1.8/axis | 1.8/axis | 1.8/axis | μF±20% | |
| Material | Steel, Aluminum | Steel, Aluminum | Steel, Aluminum | Steel, Aluminum | Steel, Aluminum | ||
| Mass | 100 | 100 | 170 | 170 | 230 | g±5% | |
