| Removal gas | PFCa gases (CF4, C2F6, C3F8, NF3, SF6, etc.) |
|---|---|
| Characteristics | PFCs removal : ≥ 98% No emission of fluorocompounds, NOx and SOx Thermally resistant to 800 oC |
| Usage | Semiconductor and Display dustries |
a : Perfluorocompounds (which include perfluorocarbons)
| Product | Purelyst PFC-101 |
|---|---|
| Shape | Pellet |
| Diameter (mm) | 3 |
| Length (mm) | 5~15 |
| Apparent density (g/cm3) | 0.90±0.10 |
| Color | Brown |
| Gas | Temperature (oC) | Reaction mechanism |
|---|---|---|
| CF4 | ≥ 550 | CF4 + Puresorb PFC-100 → MFx + CO2 |
| NF3 | ≥ 350 | NF3 + Puresorb PFC-100 → MFx + N2 |
| SF6 | ≥ 550 | SF6 + Puresorb PFC-100 → MxFy + M1-xSz |
* M : Metal (carbonate, hydroxide)
