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PR Pump and Photo Resist Pump
PR Pump and Photo Resist Pump
FOB Price
Port
3WEEKS
Korea (North)
Main Products : tel track, act8, act12, photo track, track, led, semicon, machine, cmp, aligner, ust, wafer, vsp, coater
Chorokro 720-7 Whaseong, Gyeonggi-do
PR Pump and Photo Resist Pump Details
Brand Name
UST
Model Number
SDP-2150S
Place of Origin
Korea
PR Pump and Photo Resist Pump Introduce

PHOTO RESIST SDP-2150S PUMP

It’s Stepping Motor Pump which is suitable for a constant delivery pump.

Driving Method

Inner Type Bellows, No ripple & No shaking

Discharge & Control Method

- 5 phase step motor controls with stable

- Built in Motor Driver and CPU Board

- Pump status LED (Dispense, Pump, Home and Alarm)

- Compatible Pump Signal with Machine

- Auto dummy mode for Purge (Max, 999 times)

- DI/O Status Display

- Pump History recording

- Adjust the Dispense Delay Time

Optional

- Easy Software update to User request

- LAN Port for Pump maintenance by Laptop

- External Teaching Panel

Pump Specification

ITEM

DESCRIPTION

PROCESS

Maximum Dispense Volume

8.0cc

Dispense / Reload Rate

0.1cc/sec ~ 4.0cc/sec

Dispense Volume Resolution

0.1cc

Dispense Repeatability

±0.1 (0.8cp, 23°C)

Viscosity

Max : 150cp

Electrical Specification

Drive System

Built in Motor Driver and Controller

Control System

Micom controller and

Optional External Teaching Panel

Main Power

AC100~200V Free Voltage or DC 24V

Output Port

RS-232C Port or USB or RJ-45 LAN for Laptop

External TP Panel Port (Serial 9P)

DI/O Port (Serial 9P)

Main AC Power or DC Power Cable (Select)

Hardware

Input Pulse / Dispense Volume

812 pulse (full step) / 1cc

Input Signal

Pump Ready, Dispense and Spare

Output Signal

Alarm and Spare

Resist In/Out

1/4 inch Teflon

Input Pulse / Encoder Output Pulse

Full step – 1:1     Half step – 2:1

Weight

3.2kg

Dimension

56(W) x 250 (L) x 200 (H) mm

     

PHOTO RESIST SDP-2150 PUMP

It’s Stepping Motor Pump which is suitable for a constant delivery pump.

Driving Method

- Inner Type Bellows, No ripple & No shaking

Discharge & Control Method

- 5 phase step motor controls with stable

- Optional External Mono LCD Key Pad

- Pump status LED (Pump Run, Ready, Home and Alarm)

Signal is same as RRC Pump (ACT/MARK)

Pump Specification

ITEM

DESCRIPTION

PROCESS

Maximum Dispense Volume

8.0cc

Dispense / Reload Rate

0.1cc/sec ~ 4.0cc/sec

Dispense Volume Resolution

0.1cc

Dispense Repeatability

±0.1 (0.8cp, 23°C)

Viscosity

Max : 150cp

Electrical Specification

Drive System

Phase Stepping Motor, Driver Current : 300~500mA/cycle

Control System

Power 5V

Main Power

N/A

Input Port

Encoder and 5-Phase Port (same with RRC)

Hardware

Input Pulse / Dispense Volume

812 pulse (full step) / 1cc

Resist In/Out

1/4 inch Teflon

Input Pulse / Encoder Output Pulse

Full step – 1:1     Half step – 2:1

Weight

2.3kg

Dimension

56(W) x 250 (L) x 153.5 (H) mm

     

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