Please help fill in the upgrade kits RFQ at our website for suitable configuration for your used semiconductor equipment . Appreciate your time.

Why upgrade your old used semiconductor process equipment ?

Low cost solution of obsolete components and parts.

Use new air cooling RF generator to replace the obsolete water cooling RF Generator, avoiding water flood in Fab/Lab.Use new integrated solid robotic wafer transfer to replace the obsolete index/frog robotic wafer transferRequirement of stability of the systemRequirement of network function (GEM/SECSII).Requirement of PC control for data storage.Requirement of GUI.Requirement of more precise control.Requirement of better repeatability, uniformity.Requirement of easier maintenance, calibration, and trouble shooting.

Allwin21 Corp.has been focusing on providing solutions and enhancements to the following used semiconductor equipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They’ve each been PROCESS-PROVEN. Allwin21 Corp. can refurbish and/or upgrade these OEM systems with Allwin21′s comparable integrated process control system with PC, solid 3-axis robotic wafer transfer system (if applicable), and new critical components to achieve the goal of giving our customers a production edge with right cost.

We have been doing upgrade for many production proven equipment, such as Perkin-Elmer 2400, Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480, Matrix 105 , Matrix 106, Matrix 303, Matrix 303, Matrix 403, Matrix 205, Matrix 101, Matrix 102, Matrix 103, Matrix 104,Tegal 901e, Tegal 903e, Lam Research LAM AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Branson/IPC 2000, Branson IPC 3000, Branson/IPC 4000, Gasonics Aura 3000, Gasonics Aura 3010, Gasonics L3510, Gasoncis Aura 1000, Gasonics AE 2001, AG Associates Heatpulse 610, AG Associates Heatpulse 410, AG Associates Minipulse 310, AG Associates Heatpulse 210 on the field for many cases. The reliability have been improved a lot for most of the tools after upgrading. We designed the upgrade kits for these working tools that can do plug and play and most of them only need 2 to 3 days include training. For PE sputter, since it is a little complicated, but we still target to upgrade within one week include training if the machine without other problems.

Upgraded Equipment Models : Heatpulse 210 Heatpulse 410 Heatpulse 610 Perkin-Elmer 4400 Perkin-Elmer 4410 Perkin-Elmer 4450 Perkin-Elmer 4480 Perkin-Elmer 2400 Matrix 105 Matrix 106 Matrix 101 Matrix 102 Matrix 103 Matrix 104 Matrix 111 Matrix 10 Matrix 205 Matrix 303 Matrix 403 Tegal 901e Tegal 903e Gasonics Aura 1000 Gasonics AE 2001 Gasonics Aura 3010 Gasonics 2000LL Gasonics L3510 Lam AutoEtch 490 Lam AutoEtch 590 Lam AutoEtch 690 Lam AutoEtch 790 Lam AutoEtch 480 Lam AutoEtch 580 Lam AutoEtch 680 Lam AutoEtch 780 Branson/IPC 3000 Branson/IPC 2000 Branson/IPC 4000

Please find the info on our production proven equipment and upgrade kits.

Allwin21 Brochures: Rapid Thermal ProcessorsAllwin21 Brochures: Sputtering Deposition EquipmentAllwin21 Brochures: Plasma Asher Descum Equipment Allwin21 Brochures: Plasma Etcher RIE EquipmentAllwin21 Brochures: Thin Film MetrologyAllwin21 Brochures: Upgrade Kits Allwin21 Brochures: All ProductsPPT on Why AccuThermo AW 610M RTPPPT on Why AccuThermo AW820M RTPPPT on Why AW-105R Plasma Asher DescumPPT on Why AW-B3000 Barrel Batch Manual Asher DescumPPT on Why AW-1008 Microwave Plasma AsherPPT on Why AccuSputter AW4450 Sputter Deposition EquipmentPPT on Why AW-901eR AW-903eR Plasma EtcherPPT on Why AW-303R Plasma EtcherPPT on Why AWgage-150 AWgage-200 MetrologyPPT on Upgrade Kit for Gasonics L3510PPT on Upgrade Kit for Gasonics Aura 1000PPT on Upgrade Kit for Gasonics Aura 3000 Gasonics Aura 3010PPT on Upgrade Kit for Gasonics Aura 2000LLPPT on Upgrade Kit for Gasonics AE 2000LLPPT on Upgrade Kit for Gasonics AE 2001PPT on Upgrade Kit for Tegal 901e Tegal 903ePPT on Upgrade Kit for Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790PPT on Upgrade Kit for Matrix 101,Matrix 102, Matrix 103,Matrix 104,Matrix 105,Matrix 106, Matrix 108,Matrix 205,Matrix 206, Matrix 208, Matrix 303,Matrix 403PPT on Upgrade Kits for Branson/IPC 2000, Branson/IPC 3000, Branson/IPC 4000, Barrel Asher, Barrel Etch, Barrel EtcherVideo on Why AccuThermo AW610M RTPVideo on Why AccuThermo AW820M RTPVideo on AccuThermo AW610Video on AW-105R Asher DescumVideo on AW-1008 Plasma Asher Video on AW-3000 Plasma AsherVideo on AW-901eR AW-903eR Plasma EtchVideo on AccuSputter AW4450 Sputter Deposition EquipmentVideo on Upgrade Kit for Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790